DF-760E NanoTrace

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A unique analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).

In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 200ppt (H2O) / 75ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.

This exceptional measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.

Unique dual measurement trace/ultra-trace moisture/oxygen analyzer for quality control of UHP bulk gases

Gas: O2 and H2O

Measures: ppm, ppb and ppt

Application: Quality Control

Sensing Technology: Laser Moisture


  • Bulk gas quality control checks for integrated circuit board fabs
  • Leak detection checks


  • Unique industry solution for ppt monitoring of moisture and O2
  • Operable via front panel or digital communication options
  • Broad Detection Range: 0-20ppm – 0-2ppb min (H20) / 0-20ppm – 0-1ppb min. (O2)

Easy to use

  • Dual analysis capability provides ‘one-box’ solution to H2O/Otrace contaminant measurements
  • A single analyzer can be used for multiple background gases: N2, H2, He, Ar and O2

Low cost of ownership

  • Resilient TDL and non-depleting Coulometric sensing requires minimal ongoing maintenance
  • Zero sensor drift greatly extends calibration intervals
  • Coulometric E-Sensor immune from acid damage

Unrivalled performance

  • Stable, accurate sensing delivers industry-leading trace measurements
  • 200ppt LDL (H2O) / 75ppt LDL (O2)
  • Manufactured by Servomex - over 60 years’ experience pioneering gas analysis thousands of units used in the field

Benchmark compliance

  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive


  • 483mm (19”) Wide x 266mm
  • (10.5”) High x 608mm (23.9”) Deep 


  • 31.8kg (70lbs)


  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive


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