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DF-750 NanoTrace

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Designed specifically to make trace and ultra-trace measurements in a range of ultra high purity gases, the DF-750 is the leading choice in moisture analysis for the semiconductor industry. Optimized for use in 300mm semiconductor fabs, the DF-750 measures moisture as a contaminant in electronics grade nitrogen, hydrogen, helium, argon and oxygen.

With Servomex’s industry-leading TDL sensing technology delivering an industry-leading 200ppt Lower Detection Limit (LDL), the DF-750 delivers a stable, highly accurate measurement that meets the precise monitoring needs of semiconductor production.

This analyzer also offers attractive affordability over product life. The DF-750’s robust sensor construction has low lifetime maintenance requirements and delivers zero-drift stability that greatly extends calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 is the first-choice analytical solution for UHP gas quality checks.

Tunable Laser Diode (TDL) trace-ultra moisture measurements for quality control in semiconductor fabs

Gas: H2O

Measures: ppm, ppb and ppt

Application: Quality Control

Sensing Technology: Laser Moisture

Applications

  • Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs
  • Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs

Flexible

  • Trace level Tuneable Diode Laser (TDL) sensing provides high stability and minimal moisture contact with optical elements
  • Broad detection range: 0-20ppm
  • Storage and recall function: calibration, system error and measurement data facilitates archiving operational history
  • Operable via front panel or digital communication options

Easy to use

  • Simplified ongoing maintenance requirements through the use of non-depleting, low drift potential TDL sensing technology
  • High reliability; repeatable baseline measurements are not affected by a loss in mirror reflectivity

Low cost of ownership

  • Robust sensor construction reduces maintenance requirements
  • Zero drift extends calibration intervals

Unrivalled performance

  • Uses industry-leading, non-depleting, high stability TDL trace sensing with zero drift
  • Industry leading 200ppt Lower Detection Limit
  • Manufactured by Servomex - over 60 years’ experience pioneering gas analysis with thousands of units used in the field

Benchmark compliance

  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

Size

  • 483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep

Weight

  • <31.8kg (70lbs)

Certifications

  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

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