Ürünler

DF-730 NanoTrace

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Designed to analyze moisture contamination in electronics grade HCl used in semiconductor fabs, the DF-730’s highly sensitive performance is ideal for quality control and leak detection applications. Servomex’s industry-leading TDL sensing technology and a robust Herriot Cell enables a broad measurement range of 1ppb-10ppm. By ensuring moisture only comes into contact with minimal optical components, the DF-730’s performance is unaffected by loss in mirror reflectivity - ensuring a fast response measurement that is stable, accurate and consistent. 

This device is also optimized to deliver attractive affordability over product life. The use of leading-edge TDL sensing technology provides zero drift, helping to extend maintenance periods and reduce calibration needs; these aspects combine to make the DF-730 an ideal solution for semiconductor fabs, with its high performance, ultra-stable monitoring capability and considerable operational cost-savings.

Tunable Diode Laser (TDL) trace moisture measurements, suitable for monitoring electronic grade HCI gas production in semiconductor fabs

Gas: H2O

Measures: ppm, ppb and ppt

Application: Quality Control

Sensing Technology: Laser Moisture

Applications

  • Quality control of HCl gas in semiconductor fabs 

Flexible

  • Tunable Laser Diode (TDL) sensing provides high stability and minimal moisture contact with optical elements 
  • Broad detection range: 1ppb – 10ppm 
  • Operable via front panel or digital communication options 

Easy to use

  • Simplified ongoing maintenance requirements with no consumables required 
  • High reliability; repeatable baseline measurements unaffected by loss in mirror reflectivity 

Low cost of ownership

  • Maintenance periods extended by the use of ultra-stable TDL sensing technology 
  • Zero drift reduces calibration requirements 

Unrivalled performance

  • Analysis immune from gas cell concentration: DF-730 operates to specification with up to 90% signal loss
  • 1ppb Lower Detection Limit (LDL)
  • Manufactured by Servomex - over 60 years’ experience with thousands of units used in the field

Benchmark compliance

  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

Size

  • 465mm (12.1") Wide x 190 (7.9") High x 253mm (9.9") Deep

Weight

  • <31.8kg (70lbs)

Compliance

  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

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